I found that the TMP in south end was failed. The TMP controller showed red indication but the LCD was disappeared.
Similar to the case in BS, oil vapor went from the RP to the TMP. Therefore the RP was replaced to the dry pump from the MC.
The TMP controller was replaced to the other one from the BS. The TMP is under baking to remove the contamination due to the oil vapor.
Baking time today (11/25): 14:00-17:00 (3 hours)
Baking time today (11/26): 9:30-10:30 (1 hour)
After the temparature settled, I opened the gate valves for the TMP. The pressure was decreased from 1x10-6 mbar to 2x10-7 mbar.