Before I opened the gate valves between input/BS and input/arm, the pressures in input, BS, arm was 1.3e-6 mbar, 9.9e-10 mbar, 3.1e-8 mbar, respectively.

First I opened the gate valve between input/BS. After 1 hour, the pressures in input and BS chambers became 5.5e-7 mbar and 1.9e-8 mbar, respectively.

Then I opened the small/large gate valves between input/arm. The pressures in input, arm became 5.4e-7 mbar,4.5e-7 mbar, respectively.