Abe, Dan,
We could see IR scattering light.(See fig.)
Scattered light was visible only in the center of substrate.
We measured again in another angle.
Scattered light was visible in same position.
So we believe that internal scattered light does not have a strong angular dependence.
We start calibration for IR measurement.
We will use 1050nm LED.
We will use an optical table outside clean room. Please don't touch these components.